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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/24/2003
Application #:
09899946
Filing Dt:
07/06/2001
Publication #:
Pub Dt:
06/13/2002
Inventors:
Keiichi Tanaka, Yukiharu Okubo, Hiroaki Narushima, Yukio Kakizaki, Yasushi Yoda
Title:
STAGE APPARATUS INCLUDING NON-CONTAINING GAS BEARINGS AND MICROLITHOGRAPHY APPARATUS COMPRISING SAME
Assignment: 1
Reel/Frame:
012487/0909Recorded: 01/16/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/25/2001
Exec Dt:
09/25/2001
Exec Dt:
09/25/2001
Exec Dt:
09/25/2001
Exec Dt:
09/25/2001
Assignee:
FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO 100, JAPAN
Correspondent:
KLARQUIST SPARKMAN LLP
DONALD L. STEPHENS JR.
121 S.W. SALMON STREET
ONE WORLD TRADE CENTER, SUITE 1600
PORTLAND, OR 97204-2988

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