Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09805223
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Filing Dt:
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03/14/2001
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Publication #:
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Pub Dt:
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12/06/2001
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Inventor:
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Shigeru Hagiwara
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Title:
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EXPOSURE APPARATUS AND ITS MAKING METHOD, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, 100-8331, JAPAN |
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| OBLON, SPIVAK, MCCELLAND, MAIER, ET AL |
| GREGORY J. MAIER |
| FOURTH FLOOR 1755 JEFFERSON DAVIS HWY |
| ARLINGTON, VIRGINIA 22202 |
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