Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09380520
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Filing Dt:
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11/26/1999
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Inventors:
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TADAHIRO OHMI, MASAKI HIRAYAMA, YUSUKE HIRAYAMA, HARUYUKI TAKANO
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Title:
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PLASMA ETCHING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AOBA-KU, SENDAI-SHI |
| 1-17-301, KOMEGABUKURO 2-CHOME |
| MIYAGI-KEN 980-0813, JAPAN |
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO 107-0052, JAPAN |
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| RANDALL J. KNUTH, P.C. |
| RANDALL J. KNUTH |
| 3510-A STELLHORN ROAD |
| FORT WAYNE, IN 46815-4631 |
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