Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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10095040
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Filing Dt:
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03/12/2002
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Publication #:
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Pub Dt:
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01/09/2003
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Inventors:
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Yasuhiro Marume, Toshiyuki Watanabe, Masaki Otani, Takamasa Inobe, Yasuhiro Sato
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Title:
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APPARATUS AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING SYSTEM UTILIZING RECYCLED WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 2-3, MARUNOUCHI 2-CHOME |
| TOKYO 100-8310, JAPAN |
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| CHIYODA-KU |
| 4-1, MIZUHARA, ITAMI-SHI |
| HYOGO 664-0005, JAPAN |
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| MCDERMOTT, WILL & EMERY |
| STEPHEN A. BECKER |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1753, SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, |
| KANAGAWA, JAPAN 211-8668 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 THIRTEENTH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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