Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09905749
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Filing Dt:
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07/12/2001
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Publication #:
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Pub Dt:
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03/20/2003
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Inventors:
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Abdul Rahim Forouhi, Dale A. Harrison, Eric Maiken, John C. Lam
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Title:
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METHOD OF MONITORING THIN-FILM PROCESSES AND METROLOGY TOOL THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3150 DE LA CRUZ BLVD., SUITE 105 |
| SANTA CLARA, CALIFORNIA 95054 |
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| MAREK ALBOSZTA |
| LUMEN |
| 45 CABOT AVENUE, SUITE 110 |
| SANTA CLARA, CA 95051 |
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