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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/22/2003
Application #:
09537913
Filing Dt:
03/28/2000
Inventors:
Wilbur Krusell, John M. de Larios, Mike Ravkin
Title:
SINGLE WAFER RESIDUE, THIN FILM REMOVAL AND CLEAN
Assignment: 1
Reel/Frame:
010653/0014Recorded: 03/28/2000Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/28/2000
Exec Dt:
03/28/2000
Exec Dt:
03/28/2000
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MARTINE PENILLA & KIM, LLP
ALBERT S. PENILLA
710 LAKEWAY DRIVE, SUITE 170
SUNNYVALE, CA 94086

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