Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09494327
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Filing Dt:
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01/28/2000
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Inventors:
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Michael Chiu Kwan, Alan W. Collins, Jalel Hamilia, Padmanabhan Krishnaraj et al
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Title:
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METHOD AND APPARATUS FOR CLEANING A SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Assignment:
1
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MORTGAGE (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O.BOX 450A, M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, LEGAL AFFAIRS DEPT. |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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