Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09452174
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Filing Dt:
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12/01/1999
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Inventors:
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TATEHITO USUI, KEN YOSHIOKA, SHOJI IKUHARA, KOUJI NISHIHATA, KAZUE TAKAHASHI et al
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Title:
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ETCHING END POINT JUDGING METHOD, ETCHING END POINT JUDGING DEVICE, AND INSULATING FILM ETCHING METHOD USING THESE METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| ALAN E. SCHIAVELLI |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VIRGINIA 22209 |
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