Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09986176
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Filing Dt:
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11/07/2001
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Publication #:
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Pub Dt:
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05/08/2003
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Inventors:
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Steven D. Golladay, Michael S. Gordon, Rodney A. Kendall, Shinichi Kojima et al
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Title:
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HIGH PERFORMANCE SOURCE FOR ELECTRON BEAM PROJECTION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHI PLANT 6-3, NISHI-OHI 1-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN 140-6 |
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| WHITHAM, CURTIS & CHRISTOFFERSON, P.C. |
| MARSHALL M. CURTIS |
| 11491 SUNSET HILLS ROAD |
| SUITE 340 |
| RESTON, VA 20190 |
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