Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09232682
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Filing Dt:
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01/19/1999
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Publication #:
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Pub Dt:
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01/02/2003
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Inventors:
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HIROSHI KIGUCHI, HITOSHI FUKUSHIMA, SATOSHI NEBASHI, TATSUYA SHIMODA
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Title:
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PATTERN FORMATION METHOD AND SUBSTRATE MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-1, NISHISHINJUKU 2-CHOME SHINJUKU-KU |
| TOKYO 163-0811, JAPAN |
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| FISH & RICHARDSON P.C. |
| JOHN C. PHILLIPS |
| 601 THIRTEENTH STREET, N.W. |
| WASHINGTON, DC 20005 |
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