Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09914418
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Filing Dt:
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08/28/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Inventors:
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Michio Komatsu, Akira Nakashima, Miki Egami, Ryo Muraguchi
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Title:
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METHOD OF FORMING A SILICA-CONTAINING COATING FILM WITH A LOW DIELECTRIC CONSTANT AND SEMICONDUCTOR SUBSTRATE COATED WITH SUCH A FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 580, HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI |
| KANAGAWA, JAPAN 212-0 |
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| WEBB ZIESENHEIM LOGSDON & ET AL |
| KENT E. BALDAUF |
| 436 SEVENTH AVENUE |
| 700 KOPPERS BUILDING |
| PITTSBURGH, PA 15219-1818 |
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