Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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09951111
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Filing Dt:
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09/10/2001
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Publication #:
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Pub Dt:
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04/11/2002
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Inventor:
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Shohei Suzuki
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Title:
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METHODS AND APPARATUS FOR CONTROLLING BEAM BLUR IN CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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MARUNOUCHI 3-CHOME |
FUJI BUILDING, 2-3 |
CHIYODA-KU, TOKYO 100, JAPAN |
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KLARQUIST SPARKMAN LLP |
DONALD L. STEPHENS JR. |
ONE WORLD TRADE CENTER, SUITE 1600 |
121 S.W. SALMON STREET |
PORTLAND, OREGON 97204-2988 |
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