Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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09968212
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Filing Dt:
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09/29/2001
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Publication #:
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Pub Dt:
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04/03/2003
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Inventors:
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Jihperng Leu, Chih-I Wu, Ying Zhou, Grant Kloster
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Title:
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METHOD FOR IMPROVING NUCLEATION AND ADHESION OF CVD AND ALD FILMS DEPOSITED ONTO LOW-DIELECTRIC-CONSTANT DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BLVD. |
| SANTA CLARA, CALIFORNIA 95052 |
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| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN |
| MATTHEW C. FAGAN |
| 12400 WILSHIRE BOULEVARD |
| 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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