Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/2003
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Application #:
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09854332
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Filing Dt:
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05/11/2001
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Publication #:
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Pub Dt:
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06/13/2002
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Inventors:
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Lee Veneklasen, David L. Adler, Matthew Marcus
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Title:
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APPARATUS FOR INSPECTION OF SEMICONDUCTOR WAFERS AND MASKS USING A LOW ENERGY ELECTRON MICROSCOPE WITH TWO ILLUMINATING BEAMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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160 RIO ROBLES |
SAN JOSE, CALIFORNIA 95134 |
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KEVIN MCANDREWS |
KLA-TENCOR CORP |
160 RIO ROBLES |
SAN JOSE CA 95134 |
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