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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/26/2003
Application #:
09814067
Filing Dt:
03/22/2001
Publication #:
Pub Dt:
09/26/2002
Inventor:
Fu-Sheng Chen
Title:
WAFER CHUCK SYSTEM
Assignment: 1
Reel/Frame:
011626/0707Recorded: 03/22/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/01/2001
Assignee:
SCIENCE-BASED INDS. PARK
NO. 4 CREATION ROAD III
HSINCHU, TAIWAN R.O.C
Correspondent:
FINNEGAN, HENDERSON, FARABOW ET AL
RICHARD V. BURGUJIAN
1300 I STREET, N.W.
WASHINGTON, D.C. 20005

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