Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2003
|
Application #:
|
10013180
|
Filing Dt:
|
12/07/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/12/2003
| | | | |
|
Inventor:
|
Shawming Ma
|
|
Title:
|
METHOD OF REDUCING PLASMA CHARGING DAMAGE DURING DIELECTRIC ETCH PROCESS FOR DUAL DAMASCENE INTERCONNECT STRUCTURES
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
|
|
|
|
| APPLIED MATERIALS, INC |
| JOSEPH BACH |
| PO BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CA 95052 |
|
|
Search Results as of:
05/09/2024 03:09 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
