Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09811354
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Filing Dt:
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03/16/2001
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Publication #:
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Pub Dt:
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11/22/2001
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Inventors:
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Uwe Stamm, Hans-Stephan Albrecht, Guenter Nowinsk
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Title:
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METHOD AND APPARATUS FOR COMPENSATION OF BEAM PROPERTY DRIFTS DETECTED BY MEASUREMENT SYSTEMS OUTSIDE OF AN EXCIMER LASER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANS-BOCKLER-STRASSE 12 |
| D-37079 GOTTINGEN, GERMANY |
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| SIERRA PATENT GROUP, LTD |
| ANDREW V. SMITH |
| P.O. BOX 6149 |
| STATELINE, NV 89449 |
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