Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09846433
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Filing Dt:
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04/30/2001
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Inventors:
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Vahid Vahedi, Stanley Siu
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Title:
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METHOD FOR SCALING PROCESSES BETWEEN DIFFERENT ETCHING CHAMBERS AND WAFER SIZES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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THELEN REID & PRIEST LLP |
DIANE MORSE |
P.O. BOX 640640 |
SAN JOSE, CA 95164-0640 |
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