Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09854189
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Filing Dt:
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05/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Inventors:
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Jiro Kajiwara, Gerard S. Moloney, Huey-Ming Wang, Alejandro Reyes, David A. Hansen
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Title:
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SYSTEM AND METHOD FOR CMP HEAD HAVING MULTI-PRESSURE ANNULAR ZONE SUBCARRIER MATERIAL REMOVAL CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 45 E. PLUMERIA DRIVE |
| SAN JOSE, CALIFORNIA 95134 |
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| FLEHR HOHBACH TEST ALBRITTON & ET AL |
| R. MICHAEL ANANIAN |
| 4 EMBARCADERO CENTER # 3400 |
| SAN FRANCISCO, CA 94111 |
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