Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09212975
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Filing Dt:
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12/16/1998
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Inventor:
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NORIYUKI HIRAYANAGI
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Title:
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CHARGED-PARTICLE-BEAM MASK-BASED EXPOSURE APPARATUS EMPLOYING A VARIABLE MASK-ILLUMINATION FIELD AND ALIGNMENT AND CALIBRATION METHODS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| FUJI BUILDING |
| CHIYODA-KU TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN ET AL |
| GREGORY V. BEAN |
| ONE WORLD TRADE CENTER |
| 121 S. W. SALMON STREET |
| PORTLAND, OREGON 97024-2988 |
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