Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09927004
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Filing Dt:
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08/08/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Inventors:
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Chul-Ju Hwang, Kyung-Sik Shim
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Title:
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ATOMIC LAYER DEPOSITION METHOD AND SEMICONDUCTOR DEVICE FABRICATING APPARATUS HAVING ROTATABLE GAS INJECTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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OPO-UP, KWANGJU-SHI, KYONGGI-DO |
49 NUNGPYONG-RI |
KOREA, REPUBLIC OF 464-8 |
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WILDMAN, HARROLD, ALLEN & DIXON |
TIMOTHY J. KEEFER |
225 WEST WACKER DRIVE |
CHICAGO, IL 60606-1229 |
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