Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09752887
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Filing Dt:
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12/28/2000
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Publication #:
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Pub Dt:
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09/05/2002
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Inventors:
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Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi
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Title:
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METHOD FOR FABRICATING RETICLES FOR EUV LITHOGRAPHY WITHOUT THE USE OF A PATTERNED ABSORBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1111 FRANKLIN STREET |
| OAKLAND, CALIFORNIA 94607 |
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| LAWRENCE LIVERMORE NAT. LABORATORY |
| ALAN H. THOMPSON |
| PATENT GROUP, L-703 |
| BOX 808, L-703 |
| LIVERMORE, CA 94551 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 808 (L-376) |
| LIVERMORE, CALIFORNIA 94550 |
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| U. S. DEPARTMENT OF ENERGY |
| LAWRENCE LIVERMORE NATIONAL LABORATORY |
| WILLIAM C. DAUBENSPECK |
| P.O. BOX 808 (MS L-376) |
| LIVERMORE, CA 94550 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3065 BOWERS AVE. |
| SC1-2-B1 |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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| LAWRENCE LIVERMORE NAT. LABORATORY |
| ALAN H. THOMPSON |
| PATENT GROUP, L-703 |
| BOX 808 L-703 |
| LIVERMORE, CA 94551 |
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