Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09633196
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Filing Dt:
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08/07/2000
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Inventors:
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Li-Qun Xia, Frederic Gaillard, Ellie Yieh, Tian H. Lim
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Title:
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METHODS AND APPARATUS TO ENHANCE PROPERTIES OF SI-O-C LOW K FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CA 95052 |
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