Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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10014136
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Filing Dt:
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12/13/2001
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Publication #:
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Pub Dt:
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08/08/2002
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Inventor:
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Tomoyuki Matsuyama
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Title:
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FABRICATION METHOD FOR CORRECTING MEMBER, FABRICATION METHOD FOR PROJECTION OPTICAL SYSTEM, AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN 100-8 |
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| OLIFF & BERRIDGE, PLC |
| JAMES A. OLIFF |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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Assignment:
2
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| 115 SOUTH LASALLE STREET |
| CHICAGO, ILLINOIS 60603 |
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| ROBERT J. SCHNEIDER |
| CHAPMAN AND CUTLER LLP |
| 111 WEST MONROE STREET |
| CHICAGO, ILLINOIS 60603 |
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