Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10089098
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Filing Dt:
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04/12/2002
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Inventors:
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Martin Schmidt, Olivier Sublemontier
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Title:
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PRODUCTION OF A DENSE MIST OF MICROMETRIC DROPLETS IN PARTICULAR FOR EXTREME UV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 31-33 RUE DE LA FEDERATION |
| 75752 PARIS 15EME, FRANCE |
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| OBLON, SPIVAK, MCCLLEAND, ET AL. |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HWY., FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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