Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10073119
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Filing Dt:
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02/12/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Inventors:
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Johannes Jacobus Matheus Baselmans, Marco Hugo Petrus Moers, Hans Van Der Laan et al
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, A GRATING MODULE, A SENSOR MODULE, A METHOD OF MEASURING WAVE FRONT ABERRATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110 |
| NL-5503 LA VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| JACK S. BARUFKA |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| PILLSBURY WINTHROP LLP |
| ROBERT C. PEREZ |
| PO BOX 10500 |
| INTELLECTUAL PROPERTY GROUP |
| MCLEAN, VA 22102 |
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Assignment:
3
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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