Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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09988683
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Filing Dt:
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11/20/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Inventors:
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Chung-Sam Jun, Kye-Weon Kim, Yu-Sin Yang, Hyo-Hoo Kim
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Title:
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METHOD FOR INSPECTING A POLISHING PAD IN A SEMICONDUCTOR MANUFACTURING PROCESS, AN APPARATUS FOR PERFORMING THE METHOD, AND A POLISHING DEVICE ADOPTING THE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4, AVENUE DE BOIS PREAU |
| 92502 RUEIL MALMAISON, FRANCE, FRANCE |
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| MILLEN, WHITE, ZELANO & BRANIGAN, P.C. |
| I. WILLIAM MILLEN |
| ARLINGTON COURT PLAZA 1 |
| 2200 CLARENDON BLVD., SUITE 1400 |
| ARLINGTON, VA 22201 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| VOLENTINE FRANCOS PLLC |
| ADAM C. VOLENTINE |
| 12200 SUNRISE VALLEY DRIVE, SUITE 150 |
| RESTON, VIRGINIA 20191 |
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