Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09080530
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Filing Dt:
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05/18/1998
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Inventors:
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KOJI NOZAKI, EI YANO
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Title:
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RESIST COMPOSITION SUITABLE FOR SHORT WAVELENGTH EXPOSURE AND RESIST PATTERN FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA 211-8588, JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI, ET AL. |
| LE-NHUNG MCLELEAND |
| 1725 K STREET NW, SUITE 1000 |
| WASHINGTON, DC 20006 |
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