Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10052243
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Filing Dt:
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01/23/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Junichi Miyano, Kiyohiko Toshikawa, Yoshikazu Motoyama
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Title:
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METHOD OF FORMING A LOW DIELECTRIC CONSTANT FILM WITH TETRAMETHYCYCLOTETRASILOXANE (TMCTS) AND LPCVD TECHNIQUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-12, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| VOLENTINE FRANCOS, PLLC |
| ADAM C. VOLENTINE |
| 12200 SUNRISE VALLEY DRIVE, SUITE 150 |
| RESTON VA 20191 |
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