Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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10182389
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Filing Dt:
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07/29/2002
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Publication #:
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Pub Dt:
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01/02/2003
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Inventors:
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Seiichiro Kobayashi, Koichi Koyanagi, Teruo Honda, Hideo Saeki, Masaharu Motohashi
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Title:
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WAFER CHUCK, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2 FUJIHASHI 3-CHOME |
| OME-SHI, TOKYO, JAPAN 198-8532 |
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| JOHN C. LINDERMAN |
| 6831-01WOUS |
| CITYPLACE II |
| 185 ASYLUM STREET |
| HARTFORD, CT 06103 |
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