Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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10146617
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Filing Dt:
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05/15/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Inventors:
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James P. DeYoung, Stephen M. Gross, Mark I. Wagner, James B. McClain
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Title:
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METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRATES IN CARBON DIOXIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7516 PRECISION DRIVE |
| RALEIGH, NORTH CAROLINA 27613 |
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| MYERS BIGEL SIBLEY & SAJOVEC |
| KENNETH D. SIBLEY |
| POST OFFICE BOX 37428 |
| RALEIGH, NORTH CAROLINA 27627 |
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