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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/06/2004
Application #:
09800876
Filing Dt:
03/07/2001
Inventors:
John M. Yamartino, Peter K. Loewenhardt, Dmitry Lubomirsky, Saravjeet Singh
Title:
SHAPING A PLASMA WITH A MAGNETIC FIELD TO CONTROL ETCH RATE UNIFORMITY
Assignment: 1
Reel/Frame:
011653/0206Recorded: 03/07/2001Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/02/2001
Exec Dt:
02/28/2001
Exec Dt:
02/07/2001
Exec Dt:
02/05/2001
Assignee:
LEGAL AFFAIRS DEPARTMENT, MAIL STOP 2061
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY, PATENT COUNSEL
LEGAL AFFAIRS DEPARTMENT, M/S 2061
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052

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