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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/13/2004
Application #:
09818188
Filing Dt:
03/26/2001
Publication #:
Pub Dt:
10/04/2001
Inventor:
Mitsuhiro Ichijo
Title:
PLASMA CVD APPARATUS AND DRY CLEANING METHOD OF THE SAME
Assignment: 1
Reel/Frame:
011662/0451Recorded: 03/26/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/16/2001
Assignee:
398, HASE ATSUGI-SHI
KANAGAWA-KEN 243-0036, JAPAN
Correspondent:
FISH & RICHARDSON P.C.
SCOTT C. HARRIS
4350 LA JOLLA VILLAGE DRIVE, STE 500
SAN DIEGO, CA 92122

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