Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10041550
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Filing Dt:
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01/07/2002
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Publication #:
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Pub Dt:
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07/10/2003
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Inventors:
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Zheng Yuan, Steve Ghanayem, Randhir P.S. Thakur
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Title:
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METHOD OF INCREASING THE ETCH SELECTIVITY OF A CONTACT SIDEWALL TO A PRECLEAN ETCHANT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, LEGAL AFFAIRS DEPT. |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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