Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09705953
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Filing Dt:
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11/06/2000
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Inventors:
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Michael Binnard, Toshio Ueta
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Title:
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WAFER STAGE ASSEMBLY, SERVO CONTROL SYSTEM, AND METHOD FOR OPERATING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA-KU |
| 6-3, NISHI-OHI, 1-CHOME |
| TOKYO 140, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW ET AL. |
| JEMY SOEGENG |
| 1300 I STREET, NW |
| WASHINGTON, DC 20005-3315 |
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