Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/17/2004
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Application #:
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10251178
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Filing Dt:
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09/20/2002
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Inventors:
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Senzi Li, Helmuth Treichel, Kirk Ostrowski, Chevan Goonetilleke, Jim Su, David L. Chen et al
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Title:
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METHOD FOR REMOVING PHOTORESIST FROM LOW-K FILMS IN A DOWNSTREAM PLASMA SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN MORRILL LLP |
| K. ALISON DE RUNTZ |
| 3 EMBARCADERO CTR., 28TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| K. ALISON DE RUNTZ |
| PARSONS HSUE & DE RUNTZ LLP |
| 655 MONTGOMERY STREET, SUITE 1800 |
| SAN FRANCISCO, CA 94111 |
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