Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/02/2004
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Application #:
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10259212
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Filing Dt:
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09/26/2002
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Inventors:
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Matthias Kramer, Gunter Nowinski, Juergen Kleinschmidt, Marcus Serwazi
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Title:
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E-DIAGNOSTIC, LASER SIMULATOR, AUTOMATED TESTING AND DECONVOLUTION OF SPECTRA FOR LITHOGRAPHIC EXPOSURE RADIATION GENERATING SYSTEMS SUCH AS EXCIMER OR MOLECULAR FLUORINE LASER OR EUV SOURCE SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANS-BOCKLER-STRASSE 12 |
| GOTTINGEN, GEORGIA D-37079 |
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| SIERRA PATENT GROUP, LTD. |
| ANDREW V. SMITH |
| P.O. BOX 6149 |
| STATELINE, NV 89449 |
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