Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10014111
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Filing Dt:
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12/10/2001
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Publication #:
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Pub Dt:
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06/05/2003
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Inventor:
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Masaki Kurokawa
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Title:
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ESPOSURE METHOD, ELECTRON BEAM EXPOSURE APPARATUS AND FABRICATION METHOD OF ELECTRONIC DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO 179-0071, JAPAN |
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| MORRISON & FOERSTER LLP |
| DAVID L. FEHRMAN |
| 555 W. FIFTH ST. |
| STE. 3500 |
| LOS ANGELES, CA 90013-1024 |
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