Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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09876238
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Filing Dt:
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06/07/2001
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Publication #:
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Pub Dt:
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09/25/2003
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Inventors:
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Kurt F. Becker, Peter F. Kurunczi, Karl H. Schoenbach
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Title:
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MONOCHROMATIC VACUUM ULTRAVIOLET LIGHT SOURCE FOR PHOTOLITHOGRAPHY APPLICATIONS BASED ON A HIGH-PRESSURE MICROHOLLOW CATHODE DISCHARGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CASTLE POINT ON THE HUDSON |
| HOBOKEN, NEW JERSEY 07030 |
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| LICATA & TYRRELL P.C. |
| JANE MASSEY LICATA |
| 66 E. MAIN STREET |
| MARLTON, NJ 08053 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 1000 INDEPENDENCE AVE. S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585 |
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| TIMOTHY L HARNEY |
| 9800 S. CASS AVE |
| IPLD |
| ARGONNE, IL 60439 |
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