Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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10145230
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Filing Dt:
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05/13/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Siddhartha Panda, Rajiv M. Ranade, G. S. Mathad
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Title:
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METHOD TO INCREASE THE ETCH RATE AND DEPTH IN HIGH ASPECT RATIO STRUCTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORP. |
| STEVEN CAPELLA |
| 2070 ROUTE 52 |
| HOPEWELL JUNCTIONO, NY 12533 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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| INTERNATIONAL BUSINESS MACHINES CORP. |
| STEVEN CAPELLA |
| 2070 ROUTE 52 |
| ZIP 482 |
| HOPEWELL JUNCTION, NY 12533 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 81739 |
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| JONATHAN BOCKMAN |
| C/O MORRISON & FOERSTER LLP |
| 1650 TYSONS BOULEVARD SUITE 400 |
| MCLEAN, VA 22102 |
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