Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09815484
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Filing Dt:
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03/23/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Inventors:
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Joseph C. Olson, Rosario Mollica
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Title:
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METHODS AND APPARATUS FOR SCANNED BEAM UNIFORMITY ADJUSTMENT IN ION IMPLANTERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT |
| ASSOCIATES, INC. |
| GARY L. LOSER, ESQ. |
| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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