Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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09833973
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Inventors:
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Yang Zhao, Yaping Hua
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Title:
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METHOD OF ETCHING A DEEP TRENCH IN A SUBSTRATE AND METHOD OF FABRICATING ON-CHIP DEVICES AND MICRO-MACHINED STRUCTURES USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 BURTT ROAD |
| ANDOVER, MASSACHUSETTS 01810 |
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| WEINGARTEN, SCHURGIN, GAGNEBIN & HAYES |
| LLP |
| RICHARD E. GAMACHE |
| TEN POST OFFICE SQUARE |
| BOSTON, MASSACHUSETTS 02109 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE STATE OF INCORPORATION INSIDE THE ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 011713 FRAME: 0352. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| ONE TECHNOLOGY DRIVE |
| SUITE 325 |
| ANDOVER, MASSACHUSETTS 01810 |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| BOSTON, MA 02109 |
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