Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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09799527
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
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10/04/2001
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Inventors:
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Seiichiro Kanno, Ryoji Nishio, Tsutomu Tetsuka, Junichi Tanaka, Hideyuki Yamamoto et al
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Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING SEMICONDUCTOR WAFER USING PLASMA, AND WAFER VOLTAGE PROBE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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