Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10025917
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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08/29/2002
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Inventors:
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Juping Yang, Toru Fujii, Fuyuhiko Inoue
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Title:
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POSITION DETECTING METHOD AND UNIT, OPTICAL CHARACTERISTIC MEASURING METHOD AND UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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