Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10052852
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Filing Dt:
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11/02/2001
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Inventors:
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Yong--Hui Fan, Jay Rathert
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Title:
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METHOD FOR DETECTING OVER-ETCH DEFECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 160 RIO ROBLES |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS, LLP |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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