Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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10077831
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Filing Dt:
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02/15/2002
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Publication #:
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Pub Dt:
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08/21/2003
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Inventors:
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Xuyen Pham, Tuan Nguyen, Vien Quach, Ren Zhou
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Title:
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SYSTEM AND METHOD FOR POINT OF USE DELIVERY, CONTROL AND MIXING CHEMICAL AND SLURRY FOR CMP/CLEANING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| GEORGE B. LEAVELL, ESQ. |
| 710 LAKEWAY DRIVE |
| SUITE 170 |
| SUNNYVALE, CA 94085 |
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