Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10391030
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Filing Dt:
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03/17/2003
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Inventors:
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Menso Hendriks, Naoto Tsuji, Satoshi Takahashi
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Title:
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METHOD FOR FORMING LOW-DIELECTRIC CONSTANT FILM ON SEMICONDUCTOR SUBSTRATE BY PLASMA REACTION USING HIGH-RF POWER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA |
| TAMA-SHI |
| TOKYO 206-0025, JAPAN |
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| KNOBBE MARTENS OLSON & BEAR LLP |
| KATSUHIRO ARAI |
| 2040 MAIN STREET, FOURTEENTH FLOOR |
| IRVINE, CA 92614 |
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