Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10103223
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Filing Dt:
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03/19/2002
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Inventor:
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Homi E. Nariman
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Title:
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METHOD AND STRUCTURE FOR CALIBRATING SCATTEROMETRY-BASED METROLOGY TOOL USED TO MEASURE DIMENSIONS OF FEATURES ON A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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5204 E. BEN WHITE BLVD. |
AUSTIN, TEXAS 78741 |
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WILLIAMS, MORGAN & AMERSON |
J. MIKE AMERSON |
7676 HILLMONT |
SUITE 250 |
HOUSTON, TX 77040 |
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