Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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10076360
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Filing Dt:
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02/19/2002
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Publication #:
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Pub Dt:
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09/19/2002
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Inventors:
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Katsutoshi Izumi, Keiji Mine, Yoshiaki Ohbayashi, Fumihiko Jobe
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Title:
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ETCHING METHOD AND ETCHING APPARATUS OF CARBON THIN FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OSAKA-SHI |
| 2-1-22, OTEMAE, CHUO-KU |
| OSAKA 540-8570, JAPAN |
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| KITAKYUHOJI |
| 1-4-33 |
| YAO-SHI, OSAKA 581-0071, JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI, LLP |
| DONALD W. HANSON |
| 1725 K STREET NW |
| SUITE 1000 |
| WASHINGTON, D.C. 20006 |
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