Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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09946621
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Filing Dt:
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09/06/2001
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Publication #:
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Pub Dt:
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01/30/2003
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Inventors:
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Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Junichi Tanaka, Akira Kagoshima
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Title:
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MAINTENANCE METHOD AND SYSTEM FOR PLASMA PROCESSING APPARATUS ETCHING AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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